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Dynamic SIMS for the characterization of deep-submicron technology

dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-14T23:43:37Z
dc.date.available2021-10-14T23:43:37Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6978
dc.sourceIIOimport
dc.titleDynamic SIMS for the characterization of deep-submicron technology
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conferenceWorkshop on SIMS Solution for the Next Generation of Microelectronics: In and Offline Approaches
dc.source.conferencedate1/10/2002
dc.source.conferencelocationTrento Italy
imec.availabilityPublished - imec


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