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Two-dimensional carrier profiling using scanning probes

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorEyben, Pierre
dc.contributor.authorDuhayon, Natasja
dc.contributor.authorFouchier, Marc
dc.contributor.authorXu, Mingwei
dc.date.accessioned2021-10-14T23:45:31Z
dc.date.available2021-10-14T23:45:31Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6986
dc.sourceIIOimport
dc.titleTwo-dimensional carrier profiling using scanning probes
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorDuhayon, Natasja
dc.source.peerreviewno
dc.source.conference5th Annual Workshop on Semiconductor Advances for Future Electronics - SAFE
dc.source.conferencedate27/11/2002
dc.source.conferencelocationVeldhoven The Netherlands
imec.availabilityPublished - imec


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