Interfacial B-profiling: an (un)solvable problem with SIMS
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | Janssens, Tom | |
dc.contributor.author | Huyghebaert, Cedric | |
dc.contributor.author | Brijs, Bert | |
dc.contributor.author | Fruehauf, Jens | |
dc.date.accessioned | 2021-10-14T23:46:00Z | |
dc.date.available | 2021-10-14T23:46:00Z | |
dc.date.issued | 2002 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6988 | |
dc.source | IIOimport | |
dc.title | Interfacial B-profiling: an (un)solvable problem with SIMS | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.imecauthor | Huyghebaert, Cedric | |
dc.contributor.orcidimec | Huyghebaert, Cedric::0000-0001-6043-7130 | |
dc.source.peerreview | no | |
dc.source.conference | SIMS-US Workshop | |
dc.source.conferencedate | 29/04/2002 | |
dc.source.conferencelocation | Clearwater Beach, FL USA | |
imec.availability | Published - imec |
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