Authors

Kaniava, Arvydas; Menczigar, U.; Vanhellemont, Jan; Poortmans, Jef; Rotondaro, Antonio; Gaubas, Eugenijus; Vaitkus, J.; Köster, L.; Gräf, D.

Conference

Ultraclean Semiconductor Processing Technology and Surface Chemical Cleaning and Passivation

Title

IR and MW absorption techniques for bulk and surface recombination control in high-quality silicon

Publication type

Proceedings paper

Embargo date

9999-12-31