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Optimization of particle removal performance of dHF-based cleaning recipes

dc.contributor.authorVos, Rita
dc.contributor.authorCornelissen, Ingrid
dc.contributor.authorXu, Kaidong
dc.contributor.authorFyen, Wim
dc.contributor.authorMertens, Paul
dc.contributor.authorMeuris, Marc
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-14T23:58:08Z
dc.date.available2021-10-14T23:58:08Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7040
dc.sourceIIOimport
dc.titleOptimization of particle removal performance of dHF-based cleaning recipes
dc.typeProceedings paper
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorCornelissen, Ingrid
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.source.peerreviewno
dc.source.beginpage427
dc.source.endpage442
dc.source.conferenceParticles on Surfaces 7: Detection, Adhesion and Removal
dc.source.conferencedate19/06/2000
dc.source.conferencelocationNewark, NJ USA
imec.availabilityPublished - imec


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