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Damascene integration feasability of porous SiLK resin films

dc.contributor.authorWaeterloos, Joost
dc.contributor.authorStruyf, Herbert
dc.contributor.authorVan Aelst, Joke
dc.contributor.authorDas, Arabinda
dc.contributor.authorCaluwaerts, Rudy
dc.contributor.authorAlaerts, Carine
dc.contributor.authorBoullart, Werner
dc.contributor.authorTokei, Zsolt
dc.contributor.authorVan Hove, Marleen
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T23:58:40Z
dc.date.available2021-10-14T23:58:40Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7042
dc.sourceIIOimport
dc.titleDamascene integration feasability of porous SiLK resin films
dc.typeProceedings paper
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorVan Aelst, Joke
dc.contributor.imecauthorCaluwaerts, Rudy
dc.contributor.imecauthorBoullart, Werner
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.source.peerreviewno
dc.source.beginpage19
dc.source.endpage24
dc.source.conferenceAdvanced Metallization Conference 2001
dc.source.conferencedate9/10/2001
dc.source.conferencelocationMontreal Canada
imec.availabilityPublished - imec
imec.internalnotesConference Proceedings ULSI XVII


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