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Three-dimensional carrier profiling of InP-based devices using scanning spreading resistance microscopy

dc.contributor.authorXu, Mingwei
dc.contributor.authorHantschel, Thomas
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-15T00:05:42Z
dc.date.available2021-10-15T00:05:42Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7070
dc.sourceIIOimport
dc.titleThree-dimensional carrier profiling of InP-based devices using scanning spreading resistance microscopy
dc.typeJournal article
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewno
dc.source.beginpage177
dc.source.endpage179
dc.source.journalApplied Physics Letters
dc.source.issue1
dc.source.volume81
imec.availabilityPublished - imec


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