Oxygen barrier for stacked SBT-FeCAP on W-plugs

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Authors
Zambrano, R.; Casella, Patrizia; Corvasce, C.; Monchoix, Hervé; Van Autryve, Luc; Lisoni, Judit; Maes, David; Everaert, Jean-Luc; Johnson, Jo; Paraschiv, Vasile; Haspeslagh, Luc; Wouters, Dirk
Conference
Silicon Workshop
Title
Oxygen barrier for stacked SBT-FeCAP on W-plugs
Publication type
Oral presentation
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