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Oxygen barrier for stacked SBT-FeCAP on W-plugs
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Authors
Zambrano, R.
;
Casella, Patrizia
;
Corvasce, C.
;
Monchoix, Hervé
;
Van Autryve, Luc
;
Lisoni, Judit
;
Maes, David
;
Everaert, Jean-Luc
;
Johnson, Jo
;
Paraschiv, Vasile
;
Haspeslagh, Luc
;
Wouters, Dirk
Conference
Silicon Workshop
Title
Oxygen barrier for stacked SBT-FeCAP on W-plugs
Publication type
Oral presentation
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