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Comparative analysis of the nucleation and growth of copper on different low-k polymers
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Comparative analysis of the nucleation and growth of copper on different low-k polymers
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Date
2002
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Zaporojtchenko, V.
;
Erichsen, J.
;
Strunskus, T.
;
Behnke, K.
;
Faupel, F.
;
Baklanov, Mikhaïl
;
Maex, Karen
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1863
since deposited on 2021-10-15
1
last month
Acq. date: 2025-12-16
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Metrics
Views
1863
since deposited on 2021-10-15
1
last month
Acq. date: 2025-12-16
Citations