Comparative analysis of the nucleation and growth of copper on different low-k polymers

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Authors
Zaporojtchenko, V.; Erichsen, J.; Strunskus, T.; Behnke, K.; Faupel, F.; Baklanov, Mikhaïl; Maex, Karen
Conference
Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics II
Title
Comparative analysis of the nucleation and growth of copper on different low-k polymers
Publication type
Proceedings paper
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