Show simple item record

Thermostability of amorphous zirconium aluminate high-K layers

dc.contributor.authorZhao, Chao
dc.contributor.authorRichard, Olivier
dc.contributor.authorYoung, Edward
dc.contributor.authorBender, Hugo
dc.contributor.authorRoebben, G.
dc.contributor.authorHaukka, S.
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHoussa, Michel
dc.contributor.authorCarter, Richard
dc.contributor.authorTsai, Wilman
dc.contributor.authorVan Ber Biest, O.
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-15T00:13:15Z
dc.date.available2021-10-15T00:13:15Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7100
dc.sourceIIOimport
dc.titleThermostability of amorphous zirconium aluminate high-K layers
dc.typeJournal article
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHoussa, Michel
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecHoussa, Michel::0000-0003-1844-3515
dc.source.peerreviewno
dc.source.beginpage144
dc.source.endpage149
dc.source.journalJournal of Non-Crystalline Solids
dc.source.issue1
dc.source.volume303
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record