Publication:

Crystallisation and tetragonal-monoclinic transformation in ZrO2 and HfO2 dielectric thin films

Date

Loading...
Thumbnail Image

Abstract

Description

Statistics

Views

2074 since deposited on 2021-10-15
2last month
1last week
Acq. date: 2026-02-26

Citations

Statistics

Views

2074 since deposited on 2021-10-15
2last month
1last week
Acq. date: 2026-02-26

Citations