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Crystallisation and tetragonal-monoclinic transformation in ZrO2 and HfO2 dielectric thin films

dc.contributor.authorZhao, Chao
dc.contributor.authorRoebben, G.
dc.contributor.authorHeyns, Marc
dc.contributor.authorVan Der Biest, O.
dc.date.accessioned2021-10-15T00:13:30Z
dc.date.available2021-10-15T00:13:30Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7101
dc.sourceIIOimport
dc.titleCrystallisation and tetragonal-monoclinic transformation in ZrO2 and HfO2 dielectric thin films
dc.typeProceedings paper
dc.contributor.imecauthorHeyns, Marc
dc.source.peerreviewno
dc.source.beginpage1285
dc.source.endpage1288
dc.source.conferenceEuro Ceramics VII
dc.source.conferencedate9/09/2001
dc.source.conferencelocationBrugge Belgium
imec.availabilityPublished - imec
imec.internalnotesKey Engineering Materials; Vol. 206-213


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