dc.contributor.author | Kubicek, Stefan | |
dc.contributor.author | Biesemans, Serge | |
dc.contributor.author | Wang, Qingfeng | |
dc.contributor.author | Maex, Karen | |
dc.contributor.author | De Meyer, Kristin | |
dc.date.accessioned | 2021-09-29T13:08:38Z | |
dc.date.available | 2021-09-29T13:08:38Z | |
dc.date.issued | 1995 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/710 | |
dc.source | IIOimport | |
dc.title | Sub 0.1 mm nMOSFETs fabricated using experimental design techniques to optimise performance and minimise process sensitivity | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Kubicek, Stefan | |
dc.contributor.imecauthor | Biesemans, Serge | |
dc.contributor.imecauthor | Maex, Karen | |
dc.contributor.imecauthor | De Meyer, Kristin | |
dc.source.peerreview | no | |
dc.source.beginpage | 105 | |
dc.source.endpage | 106 | |
dc.source.conference | 1995 Symposium on VLSI Technology. Digest of Technical Papers; 6-8 June 1995; Kyoto, Japan. | |
dc.source.conferencelocation | | |
imec.availability | Published - imec | |