Show simple item record

Thin L-shaped spacers for CMOS devices

dc.contributor.authorAugendre, Emmanuel
dc.contributor.authorRooyackers, Rita
dc.contributor.authorde Potter de ten Broeck, Muriel
dc.contributor.authorKunnen, Eddy
dc.contributor.authorBeckx, Stephan
dc.contributor.authorMannaert, Geert
dc.contributor.authorVrancken, Christa
dc.contributor.authorVassilev, Vesselin
dc.contributor.authorChiarella, Thomas
dc.contributor.authorJurczak, Gosia
dc.contributor.authorDebusschere, Ingrid
dc.date.accessioned2021-10-15T03:59:22Z
dc.date.available2021-10-15T03:59:22Z
dc.date.issued2003-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7159
dc.sourceIIOimport
dc.titleThin L-shaped spacers for CMOS devices
dc.typeProceedings paper
dc.contributor.imecauthorde Potter de ten Broeck, Muriel
dc.contributor.imecauthorBeckx, Stephan
dc.contributor.imecauthorMannaert, Geert
dc.contributor.imecauthorVrancken, Christa
dc.contributor.imecauthorChiarella, Thomas
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorDebusschere, Ingrid
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.source.peerreviewno
dc.source.beginpage219
dc.source.endpage222
dc.source.conference33rd European Solid-State Devices Research Conference - ESSDERC
dc.source.conferencedate16/09/2003
dc.source.conferencelocationEstoril Portugal
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record