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Integration issues of metal gate on high mobility substrates

dc.contributor.authorBiesemans, Serge
dc.date.accessioned2021-10-15T04:01:31Z
dc.date.available2021-10-15T04:01:31Z
dc.date.issued2003-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7214
dc.sourceIIOimport
dc.titleIntegration issues of metal gate on high mobility substrates
dc.typeProceedings paper
dc.contributor.imecauthorBiesemans, Serge
dc.source.peerreviewno
dc.source.conferenceInternational Workshop on Metal Gate/Workfunction Engineering
dc.source.conferencedate28/09/2003
dc.source.conferencelocationStanford, CA USA
imec.availabilityPublished - imec
imec.internalnotespresentations published on Stanford internet site http://www.stanford.edu/dept/chemistry/faculty/chidsey/public/Workfunction_Engineering/


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