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Vacuum UV spectroscopic ellipsometry applied to the characterization of high-k gate dielectrics

dc.contributor.authorBoher, P.
dc.contributor.authorDefranoux, C.
dc.contributor.authorBender, Hugo
dc.date.accessioned2021-10-15T04:02:50Z
dc.date.available2021-10-15T04:02:50Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7236
dc.sourceIIOimport
dc.titleVacuum UV spectroscopic ellipsometry applied to the characterization of high-k gate dielectrics
dc.typeOral presentation
dc.contributor.imecauthorBender, Hugo
dc.source.peerreviewno
dc.source.conference3rd International Conference on Spectroscopic Ellipsometry - ICSE 3
dc.source.conferencedate6/07/2003
dc.source.conferencelocationVienna Austria
imec.availabilityPublished - imec


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