Show simple item record

Recent developments in nuclear methods in support of semiconductor characterization

dc.contributor.authorBrijs, Bert
dc.contributor.authorBender, Hugo
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorJanssens, Tom
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorNakajima, K.
dc.contributor.authorKimura, K.
dc.contributor.authorBergmaier, A.
dc.contributor.authorDollinger, G.
dc.contributor.authorvan den Berg, J.A.
dc.date.accessioned2021-10-15T04:04:14Z
dc.date.available2021-10-15T04:04:14Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7258
dc.sourceIIOimport
dc.titleRecent developments in nuclear methods in support of semiconductor characterization
dc.typeProceedings paper
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage50
dc.source.endpage62
dc.source.conferenceAnalytical Techniques for Semiconductor Materials and Processes
dc.source.conferencedate27/04/2003
dc.source.conferencelocationParis France
imec.availabilityPublished - open access
imec.internalnotesElectrochemical Society Proceedings; PV 2003-03


Files in this item

Thumbnail
Name:
7582.pdf
Size:
665.1Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record