Post patterning meso porosity creation: a potential solution for pore sealing

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Authors
Caluwaerts, Rudy; Van Hove, Marleen; Beyer, Gerald; Hoofman, Romano; Struyf, Herbert; Brom - Verheyden, Greja; Waeterloos, Joost; Tokei, Zsolt; Iacopi, Francesca; Carbonell, Laure; Le, Quoc Toan; Das, Arabinda; Vos, Ingrid; Demuynck, Steven; Maex, Karen
Conference
International Interconnect Technology Conference
Title
Post patterning meso porosity creation: a potential solution for pore sealing
Publication type
Proceedings paper
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