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From SPC to APC at IMEC's pilot line: modeling the thermal oxide growth using multiple regression analysis

dc.contributor.authorCatana, Gabriela
dc.contributor.authorDe Backker, Kris
dc.date.accessioned2021-10-15T04:06:45Z
dc.date.available2021-10-15T04:06:45Z
dc.date.issued2003-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7291
dc.sourceIIOimport
dc.titleFrom SPC to APC at IMEC's pilot line: modeling the thermal oxide growth using multiple regression analysis
dc.typeProceedings paper
dc.contributor.imecauthorDe Backker, Kris
dc.contributor.orcidimecDe Backker, Kris::0000-0002-9123-8908
dc.source.peerreviewno
dc.source.beginpage54
dc.source.endpage54
dc.source.conferenceProceedings AEC/APC Symposium XV
dc.source.conferencedate13/09/2003
dc.source.conferencelocationColorado Springs, CO USA
imec.availabilityPublished - imec


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