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Carrier spilling revisited: on-bevel junction behavior of different electrical depth profiling techniques
Publication:
Carrier spilling revisited: on-bevel junction behavior of different electrical depth profiling techniques
Date
2003
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Clarysse, Trudo
;
Eyben, Pierre
;
Duhayon, Natasja
;
Xu, Mingwei
;
Vandervorst, Wilfried
Journal
Journal of Vacuum Science and Technology B
Abstract
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1999
since deposited on 2021-10-15
417
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations
Metrics
Views
1999
since deposited on 2021-10-15
417
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations