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Variable RF MEMS capacitors with extended tuning range

dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorPuers, Bob
dc.contributor.authorTilmans, Harrie
dc.contributor.authorvan Beek, J.T.M.
dc.contributor.authorRijks, T.G.S.M.
dc.date.accessioned2021-10-15T04:17:36Z
dc.date.available2021-10-15T04:17:36Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7399
dc.sourceIIOimport
dc.titleVariable RF MEMS capacitors with extended tuning range
dc.typeProceedings paper
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpage1784
dc.source.endpage1787
dc.source.conferenceProceedings of Transducers. The 12th International Conference on Solid State Sensors, Actuators and Microsystems
dc.source.conferencedate8/06/2003
dc.source.conferencelocationBoston USA
imec.availabilityPublished - imec


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