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Determination of minimum electrostatic switching voltage in the presence of external device accelerations

dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorTilmans, Harrie
dc.contributor.authorvan Beek, J.T.M.
dc.contributor.authorRiks, G.S.M.
dc.contributor.authorPuers, Bob
dc.date.accessioned2021-10-15T04:17:42Z
dc.date.available2021-10-15T04:17:42Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7400
dc.sourceIIOimport
dc.titleDetermination of minimum electrostatic switching voltage in the presence of external device accelerations
dc.typeOral presentation
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorPuers, Bob
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.conference14th MicroMechanics Europe workshop - MME
dc.source.conferencedate2/11/2003
dc.source.conferencelocationDelft The Netherlands
imec.availabilityPublished - imec


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