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Implementation of high-k gate dielectrics - a status update
Publication:
Implementation of high-k gate dielectrics - a status update
Date
2003
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Gendt, Stefan
;
Chen, Jerry
;
Carter, Richard
;
Cartier, Eduard
;
Caymax, Matty
;
Claes, Martine
;
Conard, Thierry
;
Delabie, Annelies
;
Deweerd, Wim
;
Kaushik, Vidya
;
Kerber, Andreas
;
Kubicek, Stefan
;
Maes, Jan
;
Niwa, M.
;
Pantisano, Luigi
;
Puurunen, Riikka
;
Ragnarsson, Lars-Ake
;
Schram, Tom
;
Shimamoto, Yasuhiro
;
Tsai, Wilman
;
Röhr, Erika
;
Van Elshocht, Sven
;
Witters, Thomas
;
Young, Edward
;
Zhao, Chao
;
Heyns, Marc
Journal
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1982
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
1982
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations