A novel approach to analyse FTIR spectra of precipitates in moderately and heavily doped silicon
dc.contributor.author | De Gryse, O. | |
dc.contributor.author | Vanhellemont, J. | |
dc.contributor.author | Clauws, P. | |
dc.contributor.author | Lebedev, O. | |
dc.contributor.author | Van Landuyt, J. | |
dc.contributor.author | Simoen, Eddy | |
dc.contributor.author | Claeys, Cor | |
dc.date.accessioned | 2021-10-15T04:18:49Z | |
dc.date.available | 2021-10-15T04:18:49Z | |
dc.date.issued | 2003 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7408 | |
dc.source | IIOimport | |
dc.title | A novel approach to analyse FTIR spectra of precipitates in moderately and heavily doped silicon | |
dc.type | Journal article | |
dc.contributor.imecauthor | Simoen, Eddy | |
dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
dc.source.peerreview | no | |
dc.source.beginpage | 1013 | |
dc.source.endpage | 1017 | |
dc.source.journal | Physica B | |
dc.source.volume | 340-342 | |
imec.availability | Published - imec | |
imec.internalnotes | Paper from the 22nd International Conference on Defects in Semiconductors; July 2003; Aarhus, Denmark |
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