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A novel approach to analyse FTIR spectra of precipitates in moderately and heavily doped silicon
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Authors
De Gryse, O.
;
Vanhellemont, J.
;
Clauws, P.
;
Lebedev, O.
;
Van Landuyt, J.
;
Simoen, Eddy
;
Claeys, Cor
Journal
Physica B
Volume
340-342
Title
A novel approach to analyse FTIR spectra of precipitates in moderately and heavily doped silicon
Publication type
Journal article
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