Publication:
A novel approach to analyse FTIR spectra of precipitates in moderately and heavily doped silicon
Date
| dc.contributor.author | De Gryse, O. | |
| dc.contributor.author | Vanhellemont, J. | |
| dc.contributor.author | Clauws, P. | |
| dc.contributor.author | Lebedev, O. | |
| dc.contributor.author | Van Landuyt, J. | |
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Claeys, Cor | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.date.accessioned | 2021-10-15T04:18:49Z | |
| dc.date.available | 2021-10-15T04:18:49Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7408 | |
| dc.source.beginpage | 1013 | |
| dc.source.endpage | 1017 | |
| dc.source.journal | Physica B | |
| dc.source.volume | 340-342 | |
| dc.title | A novel approach to analyse FTIR spectra of precipitates in moderately and heavily doped silicon | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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