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Thermal infrared detection using linear arrays of poly SiGe uncooled microbolometers

dc.contributor.authorDe Moor, Piet
dc.contributor.authorCreten, Ybe
dc.contributor.authorGoessens, Claus
dc.contributor.authorLeonov, Vladimir
dc.contributor.authorVermeiren, Jan
dc.contributor.authorVan Hoof, Chris
dc.date.accessioned2021-10-15T04:22:25Z
dc.date.available2021-10-15T04:22:25Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7439
dc.sourceIIOimport
dc.titleThermal infrared detection using linear arrays of poly SiGe uncooled microbolometers
dc.typeProceedings paper
dc.contributor.imecauthorDe Moor, Piet
dc.contributor.imecauthorLeonov, Vladimir
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.orcidimecLeonov, Vladimir::0000-0002-4364-8945
dc.source.peerreviewno
dc.source.beginpage140
dc.source.endpage142
dc.source.conferenceProceedings ICM - 15th International Conference on Microelectronics
dc.source.conferencedate9/12/2003
dc.source.conferencelocationCairo Egypt
imec.availabilityPublished - imec


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