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Reliability investigation of RF MEMS

dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-15T04:25:24Z
dc.date.available2021-10-15T04:25:24Z
dc.date.issued2003-07
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7463
dc.sourceIIOimport
dc.titleReliability investigation of RF MEMS
dc.typeProceedings paper
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.conferenceProc. 4th Workshop on MEMS for Millimeterwave Communications
dc.source.conferencedate2/07/2003
dc.source.conferencelocationToulouse France
imec.availabilityPublished - imec


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