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Techniques for mechanical strain analysis in submicron structures: TEC/CBED, micro-Raman spectroscopy, X-ray microdiffraction and modeling

dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorSenez, V
dc.contributor.authorBalboni, R.
dc.contributor.authorArmigliato, A.
dc.contributor.authorFrabboni, S.
dc.contributor.authorCedola, A.
dc.contributor.authorLagomarsino, S.
dc.date.accessioned2021-10-15T04:25:46Z
dc.date.available2021-10-15T04:25:46Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7466
dc.sourceIIOimport
dc.titleTechniques for mechanical strain analysis in submicron structures: TEC/CBED, micro-Raman spectroscopy, X-ray microdiffraction and modeling
dc.typeJournal article
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.beginpage425
dc.source.endpage435
dc.source.journalMicroelectronic Engineering
dc.source.issue2_4
dc.source.volume70
imec.availabilityPublished - imec
imec.internalnotesMaterials for Advanced Metallization 2003


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