Authors

De Wolf, Ingrid; Senez, V; Balboni, R.; Armigliato, A.; Frabboni, S.; Cedola, A.; Lagomarsino, S.

Issue

2_4

Journal

Microelectronic Engineering

Volume

70

Title

Techniques for mechanical strain analysis in submicron structures: TEC/CBED, micro-Raman spectroscopy, X-ray microdiffraction and modeling

Publication type

Journal article