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Techniques for mechanical strain analysis in submicron structures: TEC/CBED, micro-Raman spectroscopy, X-ray microdiffraction and modeling
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Techniques for mechanical strain analysis in submicron structures: TEC/CBED, micro-Raman spectroscopy, X-ray microdiffraction and modeling
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Date
2003
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Wolf, Ingrid
;
Senez, V
;
Balboni, R.
;
Armigliato, A.
;
Frabboni, S.
;
Cedola, A.
;
Lagomarsino, S.
Journal
Microelectronic Engineering
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1938
since deposited on 2021-10-15
1
last month
Acq. date: 2025-12-10
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Metrics
Views
1938
since deposited on 2021-10-15
1
last month
Acq. date: 2025-12-10
Citations