Publication:
Techniques for mechanical strain analysis in submicron structures: TEC/CBED, micro-Raman spectroscopy, X-ray microdiffraction and modeling
Date
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.author | Senez, V | |
| dc.contributor.author | Balboni, R. | |
| dc.contributor.author | Armigliato, A. | |
| dc.contributor.author | Frabboni, S. | |
| dc.contributor.author | Cedola, A. | |
| dc.contributor.author | Lagomarsino, S. | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-15T04:25:46Z | |
| dc.date.available | 2021-10-15T04:25:46Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7466 | |
| dc.source.beginpage | 425 | |
| dc.source.endpage | 435 | |
| dc.source.issue | 2_4 | |
| dc.source.journal | Microelectronic Engineering | |
| dc.source.volume | 70 | |
| dc.title | Techniques for mechanical strain analysis in submicron structures: TEC/CBED, micro-Raman spectroscopy, X-ray microdiffraction and modeling | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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