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Reliability of RF-MEMS

dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorvan Spengen, Merlijn
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorCarchon, Geert
dc.contributor.authorFiorini, Paolo
dc.contributor.authorJourdain, Anne
dc.contributor.authorDe Moor, Piet
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-15T04:26:03Z
dc.date.available2021-10-15T04:26:03Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7468
dc.sourceIIOimport
dc.titleReliability of RF-MEMS
dc.typeProceedings paper
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorJourdain, Anne
dc.contributor.imecauthorDe Moor, Piet
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpage55
dc.source.conferenceAbstracts Book and Programme 4th Round Table on Micro/Nano Technologies for Space
dc.source.conferencedate20/05/2003
dc.source.conferencelocationNoordwijk The Netherlands
imec.availabilityPublished - imec


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