Characterization of charge trapping in SiO2/HfO2 dielectrics

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Authors
Degraeve, Robin; Kerber, Andreas; Cartier, Ed; Pantisano, Luigi; Groeseneken, Guido
Conference
Proceedings International Semiconductor Device Research Symposium
Title
Characterization of charge trapping in SiO2/HfO2 dielectrics
Publication type
Proceedings paper
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