Authors

Delhougne, Romain; Meunier-Beillard, Philippe; Caymax, Matty; Loo, Roger; Vandervorst, Wilfried

Conference

Book of Abstracts ISTDM - 1st International SiGe Technology and Device Meeting

Title

Development of a new type of SiGe thin strain relaxed buffer based on the incorporation of a carbon-containing layer

Publication type

Meeting abstract