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Alpha-Ta formation and its impact on electromigration

dc.contributor.authorDemuynck, Steven
dc.contributor.authorTokei, Zsolt
dc.contributor.authorBruynseraede, Christophe
dc.contributor.authorMichelon, Julien
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T04:29:25Z
dc.date.available2021-10-15T04:29:25Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7492
dc.sourceIIOimport
dc.titleAlpha-Ta formation and its impact on electromigration
dc.typeOral presentation
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.conferenceAdvanced Metallization Conference
dc.source.conferencedate21/10/2003
dc.source.conferencelocationMontreal Canada
imec.availabilityPublished - imec


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