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A infrared pneumatic detector made by micromachining technology

dc.contributor.authorChévrier, Jean-Baptiste
dc.contributor.authorBaert, Kris
dc.contributor.authorSlater, Tim
dc.date.accessioned2021-09-29T12:40:06Z
dc.date.available2021-09-29T12:40:06Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/74
dc.sourceIIOimport
dc.titleA infrared pneumatic detector made by micromachining technology
dc.typeProceedings paper
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage214
dc.source.endpage217
dc.source.conferenceMicro Mechanics Europe Workshop - MME
dc.source.conferencedate04/09/1994
dc.source.conferencelocationPisa Italy
imec.availabilityPublished - open access


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