Publication:

Two dimensional carrier profiling using scanning capacitance microscopy

Date

2003

Proceedings Paper

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Files

7553.pdf 610.01 KB

Author(s)

Duhayon, Natasja

;

Clarysse, Trudo

;

;

;

;

Vandervorst, Wilfried

;

Statistics

2010 since deposited on 2021-10-15

Acq. date: 2026-10-13