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Characterization of different tip materials for SCM

dc.contributor.authorDuhayon, Natasja
dc.contributor.authorFouchier, Marc
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorHellemans, L.
dc.date.accessioned2021-10-15T04:35:41Z
dc.date.available2021-10-15T04:35:41Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7536
dc.sourceIIOimport
dc.titleCharacterization of different tip materials for SCM
dc.typeMeeting abstract
dc.contributor.imecauthorDuhayon, Natasja
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.beginpage213
dc.source.conferenceUltra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic.
dc.source.conferencedate27/04/2003
dc.source.conferencelocationSanta Cruz, CA USA
imec.availabilityPublished - imec


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