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Application of SCM to process development of novel devices

dc.contributor.authorDuhayon, Natasja
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorHellemans, L.
dc.date.accessioned2021-10-15T04:35:49Z
dc.date.available2021-10-15T04:35:49Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7537
dc.sourceIIOimport
dc.titleApplication of SCM to process development of novel devices
dc.typeProceedings paper
dc.contributor.imecauthorDuhayon, Natasja
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.beginpage272
dc.source.endpage277
dc.source.conferenceCharacterization and Metrology for ULSI Technology
dc.source.conferencedate24/03/2003
dc.source.conferencelocationAustin, TX USA
imec.availabilityPublished - imec
imec.internalnotesAIP Conference Proceedings; Vol. 683


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