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Two-dimensional carrier profiling with Scanning Capacitance Microscopy, industry-ready innovative research

dc.contributor.authorDuhayon, Natasja
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorHellemans, L.
dc.date.accessioned2021-10-15T04:35:57Z
dc.date.available2021-10-15T04:35:57Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7538
dc.sourceIIOimport
dc.titleTwo-dimensional carrier profiling with Scanning Capacitance Microscopy, industry-ready innovative research
dc.typeProceedings paper
dc.contributor.imecauthorDuhayon, Natasja
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conference1st Flanders Engineering PhD Symposium
dc.source.conferencedate11/12/2003
dc.source.conferencelocationBrussel Belgium
imec.availabilityPublished - imec
imec.internalnotesCD-ROM Proceedings


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