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Characterization of vertical RESURF diodes using scanning probe microscopy

dc.contributor.authorDuhayon, Natasja
dc.contributor.authorXu, Mingwei
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorHellemans, L.
dc.contributor.authorRochefort, Christelle
dc.contributor.authorVan Dalen, Rob
dc.date.accessioned2021-10-15T04:36:07Z
dc.date.available2021-10-15T04:36:07Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7539
dc.sourceIIOimport
dc.titleCharacterization of vertical RESURF diodes using scanning probe microscopy
dc.typeJournal article
dc.contributor.imecauthorDuhayon, Natasja
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.beginpage143
dc.source.endpage147
dc.source.journalMaterials Science and Engineering B
dc.source.issue1_3
dc.source.volume102
imec.availabilityPublished - imec
imec.internalnotesE-MRS 2002 Symposium E: Advanced Characterisation of Semiconductors Strasbourg, 18 June - 21 June 2002


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