Characterization of vertical RESURF diodes using scanning probe microscopy

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Authors

Duhayon, Natasja; Xu, Mingwei; Vandervorst, Wilfried; Hellemans, L.; Rochefort, Christelle; Van Dalen, Rob

Issue

1_3

Journal

Materials Science and Engineering B

Volume

102

Title

Characterization of vertical RESURF diodes using scanning probe microscopy

Publication type

Journal article

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