Publication:

Alternative post-etch polymer removal in a single-wafer platform

Date

2003

Proceedings Paper

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Files

7827.pdf 255.88 KB

Author(s)

Dundas, C.

;

Vroom, R.

;

Ghekiere, John

;

Van Doorne, Patrick

;

Rink, I.

;

Sharp, I.

;

Heffernan, S.

Metrics

1861 since deposited on 2021-10-15

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Acq. date: 2025-12-09