dc.contributor.author | Ernur, Didem | |
dc.contributor.author | Carbonell, Laure | |
dc.contributor.author | Maex, Karen | |
dc.date.accessioned | 2021-10-15T04:38:31Z | |
dc.date.available | 2021-10-15T04:38:31Z | |
dc.date.issued | 2003 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7555 | |
dc.source | IIOimport | |
dc.title | The impact of annealing on the corrosion mechanism of copper films | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Ernur, Didem | |
dc.contributor.imecauthor | Maex, Karen | |
dc.source.peerreview | no | |
dc.source.beginpage | Z2.7 | |
dc.source.conference | Mechanisms in Electrochemical Deposition and Corrosion | |
dc.source.conferencedate | 21/04/2003 | |
dc.source.conferencelocation | San Francisco, CA USA | |
imec.availability | Published - imec | |
imec.internalnotes | MRS Symposium Proceedings; Vol. 751E (Electronic-only publication) | |