Galvanic corrosion testing of WCxNy barrier metal in H202 based slurries

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Authors
Ernur, Didem; Schuhmacher, Jörg; Terzieva, Valentina; Shamiryan, Denis; Maex, Karen
Conference
Proceedings of the Advanced Metallization Conference 2002
Title
Galvanic corrosion testing of WCxNy barrier metal in H202 based slurries
Publication type
Proceedings paper
Embargo date
9999-12-31
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