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Recent progress and insights in two-dimensional carrier profiling using scanning spreading resistance microscopy

dc.contributor.authorEyben, Pierre
dc.contributor.authorAlvarez, David
dc.contributor.authorClarysse, Trudo
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-15T04:38:58Z
dc.date.available2021-10-15T04:38:58Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7558
dc.sourceIIOimport
dc.titleRecent progress and insights in two-dimensional carrier profiling using scanning spreading resistance microscopy
dc.typeProceedings paper
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.beginpage685
dc.source.endpage694
dc.source.conferenceCharacterization and Metrology for ULSI Technology
dc.source.conferencedate24/03/2003
dc.source.conferencelocationAustin, Texas USA
imec.availabilityPublished - imec
imec.internalnotesAIP Conference Proceedings; Vol. 683


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