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Assessing the resolution limits of scanning spreading resistance microscopy and scanning capacitance microscopy

dc.contributor.authorEyben, Pierre
dc.contributor.authorDuhayon, Natasja
dc.contributor.authorAlvarez, David
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-15T04:39:35Z
dc.date.available2021-10-15T04:39:35Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7562
dc.sourceIIOimport
dc.titleAssessing the resolution limits of scanning spreading resistance microscopy and scanning capacitance microscopy
dc.typeProceedings paper
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorDuhayon, Natasja
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.beginpage678
dc.source.endpage684
dc.source.conferenceCharacterization and Metrology for ULSI Technology
dc.source.conferencedate24/03/2003
dc.source.conferencelocationAustin, Texas USA
imec.availabilityPublished - imec
imec.internalnotesAIP Conference Proceedings; Vol. 683


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