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Fabrication of conductive AFM probes and their use in microelectronics

dc.contributor.authorFouchier, Marc
dc.contributor.authorAlvarez, David
dc.contributor.authorEyben, Pierre
dc.contributor.authorDuhayon, Natasja
dc.contributor.authorPetry, Jasmine
dc.contributor.authorDrijbooms, Chris
dc.date.accessioned2021-10-15T04:41:26Z
dc.date.available2021-10-15T04:41:26Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7574
dc.sourceIIOimport
dc.titleFabrication of conductive AFM probes and their use in microelectronics
dc.typeOral presentation
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorDuhayon, Natasja
dc.contributor.imecauthorDrijbooms, Chris
dc.source.peerreviewno
dc.source.conferenceVeeco SPM Conference and Users Meeting
dc.source.conferencedate22/09/2003
dc.source.conferencelocationDublin Ireland
imec.availabilityPublished - imec


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