Show simple item record

Procedure to evaluate particle-substrate interaction during immersion in liquid

dc.contributor.authorFyen, Wim
dc.contributor.authorVan Steenbergen, Jan
dc.contributor.authorXu, Kaidong
dc.contributor.authorVos, Rita
dc.contributor.authorMertens, Paul
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-15T04:44:29Z
dc.date.available2021-10-15T04:44:29Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7593
dc.sourceIIOimport
dc.titleProcedure to evaluate particle-substrate interaction during immersion in liquid
dc.typeProceedings paper
dc.contributor.imecauthorVan Steenbergen, Jan
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHeyns, Marc
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage53
dc.source.endpage57
dc.source.conferenceUltra Clean Processing of Silicon Surfaces 2002 - UCPSS
dc.source.conferencedate16/09/2002
dc.source.conferencelocationOostende Belgium
imec.availabilityPublished - open access
imec.internalnotesSolid-State Phenomena; Vol. 92


Files in this item

Thumbnail
Name:
7805.pdf
Size:
272.0Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record